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Kao, C.-H., Chen, H., Chiu, J.S., Chen, K.S. and Pan, Y.T. (2010) Physical and Electrical Characteristics of the High-k Ta2O5 (Tantalum Pentoxide) Dielectric Deposited on the Polycrystalline Silicon. Applied Physics Letters, 96, 1112901-3.
http://dx.doi.org/10.1063/1.3334725

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