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Jagadeesh Chandra, S.V., Choi, C.-J., Uthanna, S. and Mohan Rao, G. (2010) Structural and Electrical Properties of Radio Frequency Magnetron Sputtered Tantalum Oxide Films: Influence of Post-Deposition Annealing. Materials Science in Semiconductor Processing, 13, 245-251.
://dx.doi.org/10.1016/j.mssp.2010.08.002

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