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Haga, K., Kamidaira, M., Kashiwaba, Y., Sekiguchi, T. and Watanabe, H. (2000) ZnO Thin Films Prepared by Remote Plasma-Enhanced CVD Method. Journal of Crystal Growth, 214, 77-80.
http://dx.doi.org/10.1016/S0022-0248(00)00068-3

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