TITLE:
Approaches for Detailed Modelling of Ultra-Precision Positioning Systems
AUTHORS:
Dominik Dahlmann, Nesrine Sassi, Berend Denkena
KEYWORDS:
Ultra-Precision, Modelling, Compensation
JOURNAL NAME:
Modern Mechanical Engineering,
Vol.6 No.1,
February
29,
2016
ABSTRACT: Nowadays, the productivity of ultra-precision machining is fundamentally limited by low feed rates because of the required accuracies in the nanometre range. An increase in motion dynamics leads to disturbances that affect the toolpath’s accuracy. Existing control concepts are not able to reliably detect and compensate the deviations caused by increased dynamics. This paper compares modelling approaches for ultra-precision positioning systems aiming to predict and compensate occurring deviations.