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Steffes, H., Imawan, C., Solzbacher, F. and Obermeier, E. (2000) Fabrication Parameters and NO2 Sensitivity of Reactively RF-Sputtered In2O3 Thin Films. Sensors and Actuators B: Chemical, 68, 249-253.
http://dx.doi.org/10.1016/S0925-4005(00)00437-8

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