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Reyntjens, S. and Puers, R. (2000) Focused Ion Beam Induced Deposition: Fabrication of Three Dimensional Microstructures and Young’s Modulus of the Deposited Material. Journal of Micromechanics and Microengineering, 10, 181-188.
http://dx.doi.org/10.1088/0960-1317/10/2/314

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