TITLE:
Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography
AUTHORS:
Hiroyo Segawa, Hiroaki Misawa
KEYWORDS:
Lithography, Capillary Force, Assembly
JOURNAL NAME:
Natural Science,
Vol.1 No.3,
December
15,
2009
ABSTRACT: Two-dimensional (2D) periodic TiO2 pillar arrays, applicable to photonic crystals and micro-channels, were fabricated by direct patterning of a TiO2-organic hybrid material by multi-beam laser interference lithography and calcination of hybrid patterns. 2D periodic pillars of a TiO2– organic hybrid material were prepared by irra-diation with the interference pattern of femto-second laser beams and removal of the non- irradiated portions. Two types of periodic pillar arrays, standing pillars and top-gathering pillars (four pillars gathered at the top), were obtained, depending on laser irradiation conditions. After calcination of TiO2–organic hybrid pillars, TiO2 pillar arrays were obtained without collapse.