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H. J. Jiang, X. C. Yuan, Y. Zhou, Y. C. Chan, and Y. L. Lam, (2000) Single-step fabrication of diffraction grat-ings on hybrid sol-gel glass using holographic interfer-ence lithography. Opt. Commun., 185 19-24.

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• TITLE: Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography

  AUTHORS: Hiroyo Segawa, Hiroaki Misawa

  KEYWORDS: Lithography, Capillary Force, Assembly

  JOURNAL NAME: Natural Science, Vol.1 No.3, December 15, 2009

  ABSTRACT: Two-dimensional (2D) periodic TiO2 pillar arrays, applicable to photonic crystals and micro-channels, were fabricated by direct patterning of a TiO2-organic hybrid material by multi-beam laser interference lithography and calcination of hybrid patterns. 2D periodic pillars of a TiO2– organic hybrid material were prepared by irra-diation with the interference pattern of femto-second laser beams and removal of the non- irradiated portions. Two types of periodic pillar arrays, standing pillars and top-gathering pillars (four pillars gathered at the top), were obtained, depending on laser irradiation conditions. After calcination of TiO2–organic hybrid pillars, TiO2 pillar arrays were obtained without collapse.