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Sumant, A.V., Auciello, O., Carpick, R.W., Srinivasan, S. and Butler, J.E. (2010) Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications. MRS Bulletin, 35, 281-288.
http://dx.doi.org/10.1557/mrs2010.550

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