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Olsson, A., Enoksson, P., Stemme, G. and Stemme, E. (1996) A Valveless Planar Pump Isotropically Etched in Silicon. Journal of Micromechanics and Microengineering, 6, 87-91. http://dx.doi.org/10.1088/0960-1317/6/1/020

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