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Vieider, C., Ohman, O. and Elderstig, H. (1995) A Pneumatically Actuated Micro Valve with a Silicone Rubber Membrane for Integration with Fluid-Handling Systems. Proceedings of the 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX, 2, June 1995, 284-286. http://dx.doi.org/10.1109/SENSOR.1995.721801

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