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Tom, G. and Liu, W. (2012) Measurement and Reduction of Micro-Bubble Formation in High-Viscosity Fluids. Proceedings of SPIE Advanced Lithography, Advances in Resist Materials and Processing Technology XXIX, 83252F, San Jose, 29 March 2012, 83252F. http://dx.doi.org/10.1117/12.927756

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