TITLE:
Analysis for Transverse Sensitivity of the Microaccelerometer
AUTHORS:
Yu LIU, Guochao WANG, Changwen GUO
KEYWORDS:
MEMS, Accelerometers, Transverse Sensitivity, Multi-Freedom Vibration Equation
JOURNAL NAME:
Engineering,
Vol.1 No.3,
November
25,
2009
ABSTRACT: For the microaccelerometer, strong axial response and weak cross-axial one are always expected. This paper presents a general analysis about transverse sensitivity of the microaccelerometer. The analysis model is developed, where the influence of response stiffness and damping in different axes, as well as symmetrical decline angles of 3 degrees of freedom system is considered. Moreover, multi-freedom vibration equations based on the analysis model are established. And the equations are solved on condition that damping force is ignored. Finally, the theoretical analysis about transverse sensitivity is accomplished, and some effective methods, which are beneficial to reduce cross disturbance, are provided.