TITLE:
A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip
AUTHORS:
K. B. Kim, J. W. Lee, S. J. Ha, Y. K. Cho, M. W. Cho
KEYWORDS:
A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip
JOURNAL NAME:
Journal of Applied Mathematics and Physics,
Vol.3 No.2,
January
30,
2015
ABSTRACT: In semiconductor manufacturing process, probe
station that is testing equipment is important. Inspection step is for detecting
defects on semiconductor before the packaging. Probe card is a part of probe
station and contains probe tip that contacts to semiconductor. Through probe
tip, it can inspect defects of semiconductor. In this paper, optimization method
is used with response surface analysis to design MEMS type probe tip.
And fabricating probe tip uses maskless lithography, electro-plating and
lapping process.