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Kowarik, S., Hinderhofer, A., Gerlach, A. and Schreiber, F. (2011) Modeling Thin Film Deposition Processes Based on Real-Time Observation. In: Cao, Z., Ed., Thin Film Growth, Woodhead Publishing, Oxford, Cambridge.

has been cited by the following article:

• TITLE: Mathematical Modeling and Experimental Validation of Mixed Metal Oxide Thin Film Deposition by Spray Pyrolysis

  AUTHORS: S. M. Navid Khatami, Olusegun J. Ilegbusi, Leonid I. Trakhtenberg

  KEYWORDS: ZnO Oxide Film, Mixed Metal Oxides, Film Growth, Modeling, Spray Pyrolysis

  JOURNAL NAME: Materials Sciences and Applications, Vol.6 No.1, January 13, 2015

  ABSTRACT: The deposition of metal oxide films using Spray Pyrolysis Technique (SPT) is investigated through mathematical and physical modeling. A comprehensive model is developed in the processes including atomization, spray, evaporation, chemical reaction and deposition. The predicted results including particle size and film thickness are compared with the experimental data obtained in a complementary study. The predicted film thickness is in a good agreement with the measurements when the temperature is high enough for the chemical reaction to proceed. The model also adequately predicts the size distribution when the nanocrystals are well-structured at controlled temperature and concentration.