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Choi, D., Shinavski, R.J., Steffier, W.S. and Spearing, S.M. (2005) Residual Stress in Thick Low-Pressure Chemical-Vapor Deposited Polycrystalline SiC Coatings on Si Substrates. Journal of Applied Physics, 97, Article ID: 074904.
http://dx.doi.org/10.1063/1.1866495

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