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Saha, B., Liu, E., Tor, S.B., Khun, N.W., Hardt, D.E. and Chun, J.H. (2010) Replication Performance of Si-N-DLC-Coated Si Micro-Molds in Micro-Hot-Embossing. Journal of Micromechanics and Microengineering, 20, 1-8.
http://dx.doi.org/10.1088/0960-1317/20/4/045007

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