TITLE:
Structural Analysis of ZnO Film Deposited by Means of Metal Organic Decomposition Method
AUTHORS:
Masato Ohmukai, Takuya Nakagawa, Masaru Kamano, Nobutomo Uehara
KEYWORDS:
ZnO Film, MOD Method, Transparent Electrode, X-Ray Analysis
JOURNAL NAME:
Journal of Materials Science and Chemical Engineering,
Vol.2 No.11,
November
10,
2014
ABSTRACT: ZnO films were deposited on glass substrates by means of a metal organic decomposition (MOD) method. We investigated the effect of annealing temperature, time and the number of laminated layers on the film structure on the basis of X-ray diffraction measurements. We found the optimum conditions of the temperature and the time to be 600°C and 40 minutes for the preparation, respectively. In addition, the layer-by-layer forming was not found to degrade the film from viewpoint of X-ray line width.