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Mei, T., Li, W.J., Ge, Y., Chen, Y., Ni, L. and Chan, M.H. (2000) An Integrated MEMS Three-Dimensional Tactile Sensor with Large Force Range. Sensors and Actuators, 80, 155-162.
http://dx.doi.org/10.1016/S0924-4247(99)00261-7

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