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M. Regular, C. Ballif, J. H. Moser and F. Lévy, “Structural, Chemical and Electrical Characterization of Reactively Sputtered WSx Thin Films,” Thin Solid Films, Vol. 280, No. 1-2, 1996, pp. 67-75. doi:10.1016/0040-6090(95)08206-9

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