TITLE:
Numerical Calculations of Some Plasma Parameters of the Capacitively Coupled RF Discharge
AUTHORS:
Mohamed Ali Hassouba, Ahmed Rida Galaly, Usama Mohamed Rashed
KEYWORDS:
RF-Discharge, Self-Consistent Model, Ohmic Heating
JOURNAL NAME:
Journal of Modern Physics,
Vol.5 No.8,
May
28,
2014
ABSTRACT: Numerical
calculations by using a self-consistent model of the collisional sheath for the
capacitively coupled RF discharge are
our target. The results indicated that, at high pressure, the ohmic heating is
usually the dominant heating mechanism in the discharge. The power dissipated
in the sheath is calculated and compared with the measured data. Moreover, we
indicated that, when the gas pressure is increased, the calculated dissipated
power is decreased also while the measured input RF power is increased. Furthermore the sheath thickness of the
capacitively coupled discharge is calculated and in the same order of the
electron oscillation amplitude in the RF field, while the ionization mean free path is shorter than it.