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S. H. Lee, S. S. Lee, J. J. Choi, J. U. Jeon and K. Ro, “Fabrication of a ZnO Piezoelectric Micro Cantilever with a High-Aspect-Ratio Nano Tip,” Microsystem Technologies, Vol. 11, No. 6, June 2005, pp. 416-423. doi:10.1007/s00542-004-0494-0

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