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Jakob, P., Chabal, Y.J., Raghavachari, K., Becker, R.S. and Becker, A.J. (1992) Kinetic Model of the Chemical Etching of Si(111) Surfaces by Buffered HF Solutions. Surface Science, 275, 407-413.
http://dx.doi.org/10.1016/0039-6028(92)90813-L
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