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I. Zubel and M. Kramkowska, “Etch Rates and Morphology of Silicon (h k l) Surfaces Etched in KOH and KOH Saturated with Isopropanol Solutions,” Sensors and Actuators A: Physical, Vol. 115, No. 2-3, 2004, pp. 549-556.
http://dx.doi.org/10.1016/j.sna.2003.11.010

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