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H. Shin, S. N. Srivastava and D. N. Ruzic, “Tin Removal from Extreme Ultraviolet Collector Optics by Inductively Coupled Plasma Reactive Ion Etching,” Journal of Vacuum Science & Technology A, Vol. 26, No. 3, 2008, pp. 389-398. http://dx.doi.org/10.1116/1.2899332

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