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R. Ikoma, H. Komatsuzaki, T. Komori, K. Kuroda, H. Saito and Y. Nishioka, “Valveless Micropumps with Dual Polyimide Diaphragms,” Applied Mechanics and Materials, Vol. 300-301, 2013, pp. 1364-1367.
http://dx.doi.org/10.4028/www.scientific.net/AMM.300-301.1364

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