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N. Suzuki, S. Masuda, M. Haritani and E. Shamoto, “Ultraprecision Micromachining of Brittle Materials by Applying Ultrasonic Elliptical Vibration Cutting,” Proceedings of the 2004 International Symposium on Micro-Nano Mechatronics and Human Science, 2004, pp. 133-138.

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