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H. Lorenz, M. Despont, N. Fahrni, J. Brugger, P. Vettiger and P. Renaud, “High-Aspect-Ratio, Ultrathick, Negative-Tone Near-UV Photoresist and Its Applications for MEMS,” Sensors and Actuators A: Physical, Vol. 64, No. 1, 1998, pp. 33-39.
http://dx.doi.org/10.1016/S0924-4247(98)80055-1
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