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C. L. Dai, M. C. Liu, F. S. Chen, C. C. Wu and M. W. Chang, “A Nanowire WO3 Humidity Sensor Integrated with Micro-Heater and Inverting Amplifier Circuit on Chip Manufactured Using CMOS-MEMS Technique,” Sensors and Actuators B: Chemical, Vol. 123, No. 2, 2007, pp. 896-901. http://dx.doi.org/10.1016/j.snb.2006.10.055

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