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M. D. G. De Luna, Warmadewanthi and J. C. Liu, “Combined Treatment of Polishing Wastewater and Fluoride-Containing Wastewater from a Semiconductor Manufacturer,” Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 347, No. 1-3, 2009, pp. 64-68.
http://dx.doi.org/10.1016/j.colsurfa.2008.12.006

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