TITLE:
Limitations of On-Wafer Calibration and De-Embedding Methods in the Sub-THz Range
AUTHORS:
Manuel Potereau, Christian Raya, Magali De Matos, Sébastien Fregonese, Arnaud Curutchet, Min Zhang, Bertrand Ardouin, Thomas Zimmer
KEYWORDS:
TRL; Open-Short; De-Embedding; Calibration
JOURNAL NAME:
Journal of Computer and Communications,
Vol.1 No.6,
November
26,
2013
ABSTRACT: This paper
investigates frequency limitations of calibration and de-embedding techniques
for S parameter measurements. First, the TRL calibration methods are analysed and the error
due to the probe movement when measuring the different line lengths is
quantified, next the coupling between the probe-heads and the wafer surface is
investigated and finally an upper frequency validity limit for the standard
Open-Short de-embedding method is given. The measured results have been
confirmed thanks to the use of an electro-magnetic simulator.