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A Scalable Low-Power Time-Encoded Interface for Unbiased Capacitive Microphones
IEEE Sensors Journal,
2025
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A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers
Journal of Microelectromechanical Systems,
2023
DOI:10.1109/JMEMS.2023.3317858
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[3]
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Development of Directional MEMS Microphone Single Module for High Directivity and SNR
IEEE Sensors Journal,
2022
DOI:10.1109/JSEN.2021.3127583
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An intelligent MXene/MoS2 acoustic sensor with high accuracy for mechano-acoustic recognition
Nano Research,
2022
DOI:10.1007/s12274-022-4973-3
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[5]
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Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer
Microsystem Technologies,
2021
DOI:10.1007/s00542-021-05217-0
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[6]
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Stiffness of out-of-plane-motion stages with large-motion folded fractal flexible hinges
Review of Scientific Instruments,
2020
DOI:10.1063/5.0017826
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Bio-Inspired Rectangular Shaped Piezoelectric MEMS Directional Microphone
IEEE Sensors Journal,
2019
DOI:10.1109/JSEN.2018.2873781
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Bioinspired low noise circular-shaped MEMS directional microphone
Journal of Micro/Nanolithography, MEMS, and MOEMS,
2019
DOI:10.1117/1.JMM.18.1.010501
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[9]
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Design Approaches of MEMS Microphones for Enhanced Performance
Journal of Sensors,
2019
DOI:10.1155/2019/9294528
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Influence of the Nasometric Instrument Structure on Nasalance Score
Applied Sciences,
2019
DOI:10.3390/app9153040
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Flexible Piezoelectric Acoustic Sensors and Machine Learning for Speech Processing
Advanced Materials,
2019
DOI:10.1002/adma.201904020
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[12]
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Micromachined Piezoelectric Acoustic Sensor with Enhanced SNR for Audio Applications
2019 IEEE SENSORS,
2019
DOI:10.1109/SENSORS43011.2019.8956690
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[13]
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A MEMS-based shifted membrane electrodynamic microsensor for microphone applications
Journal of Vibration and Control,
2018
DOI:10.1177/1077546316637298
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Basilar membrane-inspired self-powered acoustic sensor enabled by highly sensitive multi tunable frequency band
Nano Energy,
2018
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Machine learning-based self-powered acoustic sensor for speaker recognition
Nano Energy,
2018
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A MEMS Condenser Microphone-Based Intracochlear Acoustic Receiver
IEEE Transactions on Biomedical Engineering,
2017
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Multi-Objective Optimization of a Spring Diaphragm Clutch on an Automobile Based on the Non-Dominated Sorting Genetic Algorithm (NSGA-II)
Mathematical and Computational Applications,
2016
DOI:10.3390/mca21040047
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[18]
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Scaling analysis of capacitive MEMS microphones considering residual stress
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),
2016
DOI:10.1109/NEMS.2016.7758228
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Mechanics Based Design of Structures and Machines,
2014
DOI:10.1080/15397734.2014.899152
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Compliance-based modeling and design of straight-axis/circular-axis flexible hinges with small out-of-plane deformations
Mechanism and Machine Theory,
2014
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Two-Capacitor Electrostatic Microgenerators
Engineering,
2013
DOI:10.4236/eng.2013.511A002
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