Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement

ISSN Print: 2161-4881
ISSN Online: 2161-489X
www.scirp.net/journal/jsemat
E-mail: [email protected]

Citations

"Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement"
written by Mohamed Elwi Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky,
published by Journal of Surface Engineered Materials and Advanced Technology, Vol.5 No.1, 2015

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