Creation and Evaluation of Construction Guidelines Using CFD for Low Pressure Plasma Gas Feed-in Systems to Homogenize the Precursor Gas Flow

ISSN Print: 2165-3852
ISSN Online: 2165-3860
www.scirp.net/journal/ojfd
E-mail: [email protected]

Citations

"Creation and Evaluation of Construction Guidelines Using CFD for Low Pressure Plasma Gas Feed-in Systems to Homogenize the Precursor Gas Flow"
written by Gustavo Simiema de Freitas Barbosa, Klaus Vissing, Bernd Mayer,
published by Open Journal of Fluid Dynamics, Vol.6 No.4, 2016

has been cited by the following article(s):

[1]	Development of a novel plasma probe for the investigation and control of plasma‐enhanced chemical vapor deposition coating processes
	2020

[2]	Model-based performance for gas distribution from perforated manifolds and spargers
	2019

[3]	Construction and Evaluation of Gas Feed-in System, Electrodes and Gas Exhaustion System applied to Low Pressure Plasma Coating Processes
	Dissertation, 2018

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