Damping Ratio Analysis of a Silicon Capacitive Micromechanical Accelerometer

ISSN Print: 1945-3078
ISSN Online: 1945-3086
www.scirp.net/journal/wsn
E-mail: [email protected]

Citations

"Damping Ratio Analysis of a Silicon Capacitive Micromechanical Accelerometer"
written by Yuming Mo, Lianming Du, Bingbing Qu, Bo Peng, Jie Yang,
published by Wireless Sensor Network, Vol.9 No.5, 2017

has been cited by the following article(s):

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[2]	Damping parameter estimation using topological signal processing
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[3]	Dynamic Response Considerations in Typical CMOS-MEMS Accelerometer Structures
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[4]	Design of Data Acquisition System for Silicon Micro Machined Resonant Accelerometer
	2019

[5]	Robust high bandwidth oscillation‐free digital feedforward compensator for micromachined actuators
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[6]	Piezoresistive Accelerometer Mathematical Model Development With Experimental Validation
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[7]	Robust high bandwidth oscillation-free digital feedforward compensator for micromachined actuators
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[8]	A simplified equivalent circuit model for the study of squeezed film effects in a capacitive MEMS accelerometer
	Journal of Optoelectronics and …, 2017

[1]	Dynamic Response Considerations in Typical CMOS-MEMS Accelerometer Structures 2020 IEEE Latin America Electron Devices Conference (LAEDC), 2020 DOI:10.1109/LAEDC49063.2020.9073230

[2]	Design of Data Acquisition System for Silicon Micro Machined Resonant Accelerometer IOP Conference Series: Materials Science and Engineering, 2019 DOI:10.1088/1757-899X/470/1/012044

[3]	Piezoresistive Accelerometer Mathematical Model Development With Experimental Validation IEEE Sensors Journal, 2018 DOI:10.1109/JSEN.2018.2805764

[4]	Robust high bandwidth oscillation-free digital feedforward compensator for micromachined actuators Micro & Nano Letters, 2018 DOI:10.1049/mnl.2018.5413

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