Micro-Electromechanical Systems MEMS - Articles - Scientific Research Publishing

A Generic MEMS Fabrication Process Based on a Thermal Budget Approach (Articles)

Carlos Ramón Báez Álvarez, Álvarez, Mónico Linares Aranda, Alfonso Torres Jácome, Mario Moreno Moreno, Joel Molina Reyes, Carlos Zúñiga Islas, Wilfrido Calleja Arriaga

Journal of Electronics Cooling and Thermal Control Vol.6 No.2, June 29, 2016

DOI: 10.4236/jectc.2016.62009 2,541 Downloads 4,425 Views Citations
Photomechanical Ablation of 304L Stainless Steel, Aluminum Oxide (Al₂O₃) Thin Film, and Pure Silicon (Articles)

Gabriel de la Rosa-Santana, Jose Alfredo Alvarez-Chavez, Hector R. Morano-Okuno, Angel J. Morales-Ramirez, Esmeralda Uribe

Optics and Photonics Journal Vol.6 No.10, October 27, 2016

DOI: 10.4236/opj.2016.610028 2,104 Downloads 5,081 Views Citations
Damping Ratio Analysis of a Silicon Capacitive Micromechanical Accelerometer (Articles)

Yuming Mo, Lianming Du, Bingbing Qu, Bo Peng, Jie Yang

Wireless Sensor Network Vol.9 No.5, May 27, 2017

DOI: 10.4236/wsn.2017.95010 2,542 Downloads 5,640 Views Citations
Photo Acoustic Energy Applications for the Detection of Human Arterial Blockages via Multiple Skin/Bone Layers, a Non-Invasive Approach (Articles)

Monika Kakani, Neeraj Rathi, Ahdy Helmy, Ashok Kumar Thella, M. D. James Rizkalla, Paul Salama, Maher E. Rizkalla

World Journal of Cardiovascular Diseases Vol.7 No.8, August 28, 2017

DOI: 10.4236/wjcd.2017.78024 1,036 Downloads 2,024 Views Citations
In Situ Observation and Measurement of Actin Stress Fiber Deformation in Stretched Osteoblast like Cell (Articles)

Katsuya Sato, Kenta Nunobiki, Shoichiro Fujisawa, Tasuku Nakahara, Kazuyuki Minami

Advances in Bioscience and Biotechnology Vol.8 No.11, November 21, 2017

DOI: 10.4236/abb.2017.811031 1,287 Downloads 3,044 Views Citations
Multi-Direction Piezoelectric Energy Harvesting Techniques (Articles)

Chunhua Sun, Guangqing Shang

Journal of Power and Energy Engineering Vol.7 No.9, September 18, 2019

DOI: 10.4236/jpee.2019.79003 1,415 Downloads 3,366 Views Citations
A Compact MEMS-Based Optical Scanning System with Large Field of View for Lidars (Articles)

Yongjie Wang, Ligong Chen

Optics and Photonics Journal Vol.11 No.8, August 3, 2021

DOI: 10.4236/opj.2021.118016 390 Downloads 1,745 Views Citations
Analysis for Pull-In Voltage of a Multilayered Micro-Bridge Driven by Electrostatic Force (Articles)

Y. LIU, G.C. WANG, H.Y. YANG

Engineering Vol.2 No.1, January 27, 2010

DOI: 10.4236/eng.2010.21007 5,514 Downloads 9,618 Views Citations
A More Effective Technique of Design Synthesis for MEMS with Expected Performance (Articles)

Shuxun Chen

Intelligent Information Management Vol.2 No.3, March 31, 2010

DOI: 10.4236/iim.2012.23024 8,969 Downloads 12,948 Views Citations
Direction of Arrival Estimation and Localization Using Acoustic Sensor Arrays (Articles)

Vitaliy Kunin, Marcos Turqueti, Jafar Saniie, Erdal Oruklu

Journal of Sensor Technology Vol.1 No.3, September 30, 2011

DOI: 10.4236/jst.2011.13010 11,008 Downloads 18,103 Views Citations
Millimeter Scale MEMS Air Turbine Generator by Winding Wire and Multilayer Magnetic Ceramic Circuit (Articles)

Akane Iizuka, Minami Takato, Masato Kaneko, Tatsuya Nishi, Ken Saito, Fumio Uchikoba

Modern Mechanical Engineering Vol.2 No.2, May 15, 2012

DOI: 10.4236/mme.2012.22006 5,151 Downloads 10,182 Views Citations
A New Model for the Etching Characteristics of Corners Formed by Si_{111} Planes on Si_{110} Wafer Surface (Articles)

Prem Pal, Sajal Sagar Singh

Engineering Vol.5 No.11A, October 22, 2013

DOI: 10.4236/eng.2013.511A001 10,090 Downloads 15,673 Views Citations
This article belongs to the Special Issue on Micro-Electro-Mechanical Systems Research and Application
Adaptive “Cubature and Sigma Points” Kalman Filtering Applied to MEMS IMU/GNSS Data Fusion during Measurement Outlier (Articles)

Hamza Benzerrouk, Hassen Salhi, Alexander Nebylov

Journal of Sensor Technology Vol.3 No.4, December 20, 2013

DOI: 10.4236/jst.2013.34018 6,478 Downloads 10,000 Views Citations
A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip (Articles)

K. B. Kim, J. W. Lee, S. J. Ha, Y. K. Cho, M. W. Cho

Journal of Applied Mathematics and Physics Vol.3 No.2, January 30, 2015

DOI: 10.4236/jamp.2015.32030 5,281 Downloads 6,400 Views Citations
Design and Availability Research of a Flammable and Explosive Volatiles Monitoring and Early Warning System (FEVMEW) for the Bus Crowded Places (Articles)

Cen Yu, Weibin Guo, Ruyi Li, Qiang Chen, Tianping Xu

Journal of Computer and Communications Vol.8 No.12, December 24, 2020

DOI: 10.4236/jcc.2020.812008 454 Downloads 1,301 Views Citations
A Two-Scale Multi-Physics Deep Learning Model for Smart MEMS Sensors (Articles)

José Pablo Quesada-Molina, Stefano Mariani

Journal of Materials Science and Chemical Engineering Vol.9 No.8, August 31, 2021

DOI: 10.4236/msce.2021.98004 469 Downloads 1,370 Views Citations
Systems Biology: The take, input, vision, concerns and hopes (Articles)

Graeme Tucker

Journal of Biomedical Science and Engineering Vol.2 No.2, April 2, 2009

DOI: 10.4236/jbise.2009.22014 5,205 Downloads 9,703 Views Citations
Near-Infrared Transit Photometry of Extra-Solar Planet HAT-P-54b (Articles)

Haruka Tabata, Yoichi Itoh

International Journal of Astronomy and Astrophysics Vol.10 No.2, May 11, 2020

DOI: 10.4236/ijaa.2020.102007 792 Downloads 1,797 Views Citations
Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO₃) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software (Articles)

Ahmad M. Alsaad, Ahmad A. Ahmad, Qais M. Al-Bataineh, Nermeen S. Daoud, Mais H. Khazaleh

Open Journal of Applied Sciences Vol.9 No.4, April 19, 2019

DOI: 10.4236/ojapps.2019.94016 1,517 Downloads 4,180 Views Citations
Predispatch of Hydroelectric Power Systems with Modifications in Network Topologies (Articles)

Silvia M. S. Carvalho, Aurelio Oliveira

Applied Mathematics Vol.5 No.15, August 11, 2014

DOI: 10.4236/am.2014.515221 3,849 Downloads 4,976 Views Citations

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