EUV Lithography - Articles - Scientific Research Publishing

Eliminating Residual Non‐Binary Intensities in Pixelated EUV Source Optimization (Articles)

Athanasios Batgidis, Eytan Barouch, Michael Yeung

Modeling and Numerical Simulation of Material Science Vol.16 No.2, April 30, 2026

DOI: 10.4236/mnsms.2026.162002 5 Downloads 52 Views Citations
Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography (Articles)

Hiroyo Segawa, Hiroaki Misawa

Natural Science Vol.1 No.3, December 15, 2009

DOI: 10.4236/ns.2009.13022 5,935 Downloads 11,294 Views Citations
Temperature Dependence of Current-Voltage Characteristics in Individual Sb2Se3 Nanowire (Articles)

Kien-Wen Sun, Ting-Yuan Fan

Materials Sciences and Applications Vol.1 No.1, April 28, 2010

DOI: 10.4236/msa.2010.11002 5,514 Downloads 10,282 Views Citations
Submicron Size Patterned Nickel Soft Lithographic Masters Using Aluminium Template (Articles)

T. Prakash

Soft Nanoscience Letters Vol.1 No.2, April 8, 2011

DOI: 10.4236/snl.2011.12007 7,929 Downloads 12,348 Views Citations
Extendibility Evaluation of Industrial EUV Source Technologies for kW Average Power and 6.x nm Wavelength Operation (Articles)

Akira Endo

Journal of Modern Physics Vol.5 No.5, March 31, 2014

DOI: 10.4236/jmp.2014.55039 7,629 Downloads 10,079 Views Citations
This article belongs to the Special Issue on Progress of Laser Technology
Bragg-Angle Diffraction in Slant Gratings Fabricated by Single-Beam Interference Lithography (Articles)

Xinping Zhang, Shengfei Feng, Tianrui Zhai

Optics and Photonics Journal Vol.2 No.1, March 28, 2012

DOI: 10.4236/opj.2012.21003 5,535 Downloads 9,662 Views Citations
Fabrication of Binary Diffractive Lenses and the Application to LED Lighting for Controlling Luminosity Distribution (Articles)

Atsushi Motogaito, Kazumasa Hiramatsu

Optics and Photonics Journal Vol.3 No.1, March 25, 2013

DOI: 10.4236/opj.2013.31011 6,826 Downloads 11,465 Views Citations
Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device (Articles)

Xiang-Yu Ding, Yu-Xuan Ren, Rong-De Lu

Optics and Photonics Journal Vol.3 No.2B, July 22, 2013

DOI: 10.4236/opj.2013.32B053 4,985 Downloads 8,014 Views Citations
Power Law Nature in Electron Solid Interaction (Articles)

Moirangthem Shubhakanta Singh, R. K. Brojen Singh

Advances in Materials Physics and Chemistry Vol.7 No.1, January 22, 2017

DOI: 10.4236/ampc.2017.71002 1,749 Downloads 3,315 Views Citations

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